LEYSPEC view 100
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Part number:
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220010V01
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Connection flange:
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DN 40 CF
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Detector type:
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Faraday cup
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Mass filter type:
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QMS
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Mass range (amu):
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1-100
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Max operating pressure:
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1 x 10-4 mbar
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Max sensing temp:
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120 °C
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Min detectable partial pressure:
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1 x 10-10 mbar
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Operating temp:
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10 - 40 °C
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Sensitivity:
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1 x 10-5 A/mbar
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