AUGUST TECHNOLOGY Company Limited

Measuring and analysis instruments

Measuring and analysis instruments

Today, the total range of vacuum pressure accessible to measurement extends from atmospheric pressure (about 1000 mbar (750 Torr)) down to 10-12 mbar/  0.75•10-12 Torr, i.e. it extends over 15 powers of ten. The instruments used for measuring the pressure within this wide range are called vacuum gauges. For physical reasons it is not possible to create a single vacuum sensor through which it might be possible to perform quantitative measurements within the entire pressure range. Therefore, a variety of different vacuum gauges are available, each with their own characteristic measurement range which commonly extends over several powers of ten.