AUGUST TECHNOLOGY Company Limited

LEYSPEC view 200S

Part number:
220013V01
Connection flange:
DN 40 CF
Detector type:
EM/Faraday cup
Mass filter type:
QMS
Mass range (amu):
1-200
Max operating pressure:
1 x 10-4 mbar
Max sensing temp:
120 °C
Min detectable partial pressure:
1 x 10-14 mbar
Operating temp:
10 - 40 °C
Sensitivity:
400/1 x 10-5 A/mbar