AUGUST TECHNOLOGY Company Limited

LEYSPEC ultra 300S

Part number:
220021V01
Connection flange:
DN 40 CF
Detector type:
EM/Faraday cup
Mass filter type:
QMS
Mass range (amu):
1-300
Max operating pressure:
1 x 10-4 mbar
Max sensing temp:
250 °C
Min detectable partial pressure:
1 x 10-12 mbar
Operating temp:
10 - 40 °C
Sensitivity:
400/2.5 x 10-4 A/mbar